Do you need to reduce energy usage?
Environmental emissions targets and high energy prices in some regions are driving businesses to improve energy efficiency. Choosing control products that can measure temperature accurately and control precisely across multiple heater zones helps to minimize energy usage.
The Mini8 Multi Loop Controller with enhanced thermocouple inputs offers CJ measurement accuracy of +/-0.25°C (0.45°F). With 16 precision PID control loops, a range of Eurotherm proprietry control features and function blocks, Mini8 controllers offer high accuracy, multizone temperature control that aids energy optimization.
The EPack Power Controller offers a variety of firing modes to suit a wide range of heater loads. Advanced control and firing modes allow harmonic noise reduction and power factor optimization on the electrical network. In turn, this helps reduce energy usage and the power factor penalty charges imposed by energy suppliers.
Is poor temperature control affecting wafer yields?
Thermal processing of silicon wafers needs accurate temperature control with fast response to temperature disturbances to achieve the desired electrical properties for high quality integrated circuits. Ramping to multiple process temperature setpoints without overshoot, and reaching steady state at the same time for improved temperature uniformity, are key to achieving high quality yields.
The Mini8 Multi Loop PID controller with enhanced thermocouple inputs offers CJ measurement accuracy of +/-0.25°C (0.45°F). Specialized control algorithms and EtherCAT communication enable fast response to temperature disturbances with minimal overshoot. Improved temperature stability helps to achieve thermal uniformity of wafers during the heating and cooling process.
The single phase EPack Compact Power Controller with EtherCAT communication offers accurate real-time control response, enabling heat cycle optimization for reduced processing time. An integrated power control loop compensates for noise disturbance on the electrical grid, while numerical power control enables temperature repeatability and stability for consistent high quality yields.
