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Expertise in controlling semiconductor equipment and processes more efficiently

Discover latest temperature control enhancements in EPack Power Controller with EtherCAT communication, and Mini8 Multi Loop Controller with improved input accuracy

 

Enhanced control designed to meet leading edge technology challenges

The design and build of leading edge technology relies on fast, reliable responses from equipment suppliers to help meet the demands of next generation developments. Machine builders need compact devices to meet smaller machine footprints, and limiting access to valuable IP (intellectual property) is an important factor to protect specialized process recipes. During processing, accurate temperature measurement, precise heater control and fast response to temperature disturbances are required, to achieve the desired temperature stability, uniformity and repeatability for a consistent, high quality yield and optimized throughput.

 

Eurotherm have over 25 years experience in improving control performance within leading edge semiconductor processes, helping machine builders, fabs and foundrys to meet their customers’ challenges and demands.

Are temperature disturbances affecting your process?

Accurate measurements and fast acting precision control is needed to compensate for sudden temperature changes in process chambers. The Mini8 Multi Loop Controller is now available with enhanced thermocouple inputs offering improved CJ accuracy of +/-0.25°C (0.45°F). With up to 16 precision PID control loops and real-time EtherCAT communication, Mini8 controllers offer high stability, fast acting repeatable temperature control, easily integrated into PLCs and wider systems.

Looking for fast acting power control for your wafer fabrication process?

Rapid thermal processing of semiconductor silicon wafers requires fast control response to minimize the impact of temperature disturbances. The single phase EPack Compact Power Controller is now available with EtherCAT™ communication for fast acting control response and common connectivity across devices. The EPack controller offers end-users accurate, repeatable temperature control for consistent high quality yields, as well as monitoring and diagnostics for improving energy efficiency and up-time.

Is reducing the footprint of machines a challenge?

As developments in semiconductor technology enable smaller components, machine builders need devices that help meet decreasing machine footprint specifications. Eurotherm process and power control products are designed to provide leading edge functionality in a compact form factor. The Mini8 Multi Loop Controller provides up to 16 precision PID loops and 32 analogue inputs for multizone heater control in a compact modular design, while the EPack Compact Power Controller with real-time measurement, I/O and communications built in, offers precision adjustable power control for 16 to 125A and 100 to 500V applications.

How can you protect your valuable IP?

When you’ve developed special process control configurations and recipes, its important to protect your intellectual property to prevent copying. Eurotherm Mini8 Multi Loop Controller and EPack Power Controllers have an ‘OEM Security Option’, allowing the control application specialist to limit access to their confidential configuration information, helping to guard their intellectual property.

Searching for equipment that’s quick and easy to install and maintain?

Engineering time can be greatly reduced by choosing devices with easy to use familiar configuration methods. Eurotherm discrete control products come with features that aid configuration, such as pre-configuration at point of order, quick-code start-up, and free iTools configuration software for easy control setup using function block style programming and a graphical wiring editor.

Simplified Integration
Mini8 Controllers provide function blocks for simplified setup of PID loops, setpoint programming, recipes, IP protection feature and more. EPack Power Controller offers a variety of software configurable control and firing modes to fit a wide range of loads. A built in display simplifies configuration, while diagnostics, alarm notifications and a fan-less design enable faster maintenance.

Looking for fast responding, easily connectable control devices?

Semiconductor processes are standardising on the high speed Ethernet-based fieldbus system, EtherCAT™ (Ethernet for Control Automation Technology), which allows real-time communication of process information.

EtherCAT Enabled Controllers
The Mini8 Multi Loop Controller and EPack single phase power controller are multi-protocol and EtherCat ready for simplified integration into machine architecture. EtherCAT communication protocol offers fast acting control response and common connectivity across EtherCAT devices, easily integrated into PLCs and wider systems. Using EtherCAT enabled devices across the control network provides a cost effective solution as standard CATx wiring can be used and network switches are not required.

Do you need to reduce energy usage?

Environmental emissions targets and high energy prices in some regions are driving businesses to improve energy efficiency. Choosing control products that can measure temperature accurately and control precisely across multiple heater zones helps to minimize energy usage.

The Mini8 Multi Loop Controller with enhanced thermocouple inputs offers CJ measurement accuracy of +/-0.25°C (0.45°F). With 16 precision PID control loops, a range of Eurotherm proprietry control features and function blocks, Mini8 controllers offer high accuracy, multizone temperature control that aids energy optimization.

The EPack Power Controller offers a variety of firing modes to suit a wide range of heater loads. Advanced control and firing modes allow harmonic noise reduction and power factor optimization on the electrical network. In turn, this helps reduce energy usage and the power factor penalty charges imposed by energy suppliers.

Is poor temperature control affecting wafer yields?

Thermal processing of silicon wafers needs accurate temperature control with fast response to temperature disturbances to achieve the desired electrical properties for high quality integrated circuits. Ramping to multiple process temperature setpoints without overshoot, and reaching steady state at the same time for improved temperature uniformity, are key to achieving high quality yields.

The Mini8 Multi Loop PID controller with enhanced thermocouple inputs offers CJ measurement accuracy of +/-0.25°C (0.45°F). Specialized control algorithms and EtherCAT communication enable fast response to temperature disturbances with minimal overshoot. Improved temperature stability helps to achieve thermal uniformity of wafers during the heating and cooling process.

The single phase EPack Compact Power Controller with EtherCAT communication offers accurate real-time control response, enabling heat cycle optimization for reduced processing time. An integrated power control loop compensates for noise disturbance on the electrical grid, while numerical power control enables temperature repeatability and stability for consistent high quality yields.

Mini8 Multi Loop Controller

Precision 4-16 Loop PID Control with EtherCAT Communication

  • New feature! – Enhanced thermocouple inputs offer CJ measurement accuracy of +/-0.25°C (0.45°F)
  • Compact design helps reduce machine footprint
  • Function blocks for simplified setup of PID loops, setpoint programming, recipes, IP protection feature and more…
  • EtherCAT communication for fast acting control response and common connectivity across devices
  • OEM Security Option for guarding valuable IP
  • Fast response to temperature disturbances with minimal overshoot, aids product quality and energy efficiency
  • Monitoring and diagnostics for improving up-time
  • 16 precision PID control loops offer temperature stability, uniformity and repeatability for a consistent, high quality yield and optimized throughput

Discover More

EPack Compact Power Controller

Single Phase SCR Power Control with EtherCAT Communication

  • New feature! – EtherCAT communication for fast acting control response and common connectivity across devices
  • Compact design helps reduce machine footprint
  • Configurable firing modes to fit a wide range of loads
  • Advanced configuration functions and strategies including maths, linearization block, and more…
  • OEM Security Option for guarding valuable IP
  • Advanced control and firing modes allow harmonic noise reduction for optimization of energy and power factor
  • Monitoring and diagnostics for improving energy efficiency and up-time
  • Measurement accuracy and control precision offer temperature stability, uniformity and repeatability for a consistent, high quality yield and optimized throughput

Discover More

Need development support to meet leading edge technology requirements?

During the creation of leading edge platforms you need equipment suppliers who can respond to your developmental needs. Development of Eurotherm products is supported by a highly-skilled R&D team, backed by control application expertise from a knowledgeable global support and service network. Internal Product Software development is approved to TickITplus Foundation Level, and Eurotherm Ltd are certified for Quality Management System ISO9001:2015.

Custom Hardware and Software

  • Special configuration files aid fast, right-first-time integration straight out of the box
  • Product firmware modifications to meet new requirements, or pre-defined set versions to help meet the needs of Copy Exact
  • Private labelling service aids OEM brand promotion

Discover Custom OEM Solutions

Engineering Support and Services

  • 24hr technical support helpdesk
  • Service Level Agreements
  • PID loop and power control expertise to help diagnose complex temperature control challenges
  • Control system engineering projects and commissioning

Contact your local sales engineer to discuss your engineering requirements

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Can you easily meet your global supply chain demands?

Eurotherm provides a range of features to help simplify your global supply chain requirements:

  • High performance process and power control products designed to meet the needs of semiconductor processing applications
  • Customized order codes enable pre-loaded configuration files for fast ordering
  • Global Supply Agreements
  • Worldwide partner/distributer network
  • Products designed to comply with international standards CE, UL, cUL, CCC (exempt), and more…
  • Sustainable performance, by design
Discover Green Premium™ Ecolabeled Eurotherm Products

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